Some Troubling Results
Posted: Sat Oct 14, 2017 11:24 am
2 months ago I decided it would be a good idea to bake out my vacuum chamber, due to the residue left when I cleaned the chamber with mineral spirits. I turned on the vacuum pump and the pressure climbed down to ~22 microns with just a roughing pump. I then blasted the vacuum chamber continuously with a heat gun for 2 hours. When doing this the pressure fluctuated but at then end of the bake out session my chamber had fallen down to 15 microns. When I closed the bellows valve, isolating my chamber from the pump, I was pleasantly surprised to see that my leak rate was around .1 micron/3min (.03 microns/min). After this i let my vacuum chamber lie dormant for 2 months.
When I came back after 2 months i had found my pressure had risen to 3.9 Torr. I turned on my vacuum pump, opened the bellows valve , and watched the camber pressure drop down to 14 microns. I decided to bake the diffusion pump and reactor for 15 minutes just to clear any remaining residue. The chamber pressure rose to 18 microns while doing this. However when I closed the bellows valve the leak rate was horrible: ~.5 microns/min, 16 times larger than my previous leak rate. This is confusing since I did not modify my chamber in any way since the previous bake out. I don't have any idea why this massive leak is occurring. I did use conflat viton gaskets on the bellows valve, but the chamber temperature during the bake out was never that high (160 degrees F) to destroy the gaskets. What could be causing this large leak rate?
When I came back after 2 months i had found my pressure had risen to 3.9 Torr. I turned on my vacuum pump, opened the bellows valve , and watched the camber pressure drop down to 14 microns. I decided to bake the diffusion pump and reactor for 15 minutes just to clear any remaining residue. The chamber pressure rose to 18 microns while doing this. However when I closed the bellows valve the leak rate was horrible: ~.5 microns/min, 16 times larger than my previous leak rate. This is confusing since I did not modify my chamber in any way since the previous bake out. I don't have any idea why this massive leak is occurring. I did use conflat viton gaskets on the bellows valve, but the chamber temperature during the bake out was never that high (160 degrees F) to destroy the gaskets. What could be causing this large leak rate?