Re[3]: Piezoelectric leak

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i have a scientific paper written on them. i am not sure where i have it buried.

from memory they are silicon micromachined...orifice with piezo diaphram. i do not believe they use a laminated stack.

im sure if you contact ics they would send you more info and any papers they know of.

sincerely,

daniel preston


Created on Sunday, December 17, 2000 3:24 PM EDT by Daniel Preston