This may sound really dumb, but what is the best positioning of the micromaze isolation valves? Is it best to position the valve seats on the forepump side or the diffusion pump (or turbo pump) side of the system? It seems to me that one wants the pressure diffential to help close the valve aganst the seat, but this pressure diffential varies depending what we are trying to accomplish, degassing a micromaze or preserving vacuum in the chamber or preserving vacuum in the foreline while working on the chamber. What is the valve positioning to obtain best over all performance? Or does it make a differenceat all?
Created on Wednesday, March 21, 2001 1:16 AM EDT by Thomas D Dressel