I don't see any problem with putting the gas feed and up-to air functions on the flange you mention. The up-to-air and gas inlets won't have a problem with low conductance, so these ports can be small. Those double-sided conflat flanges are nice ways to avoid cutting more holes in your chamber. Most of the ones I have seen use VCR fittings, which employ a nice metal to metal seal good for bakeout. It would be nice to use a larger fitting for the pump down, but the KF25 fittings on the micromaze can limit this (as well as the fittings on the available valves). You probably won't strangle a little Welch 1400 with the smaller hose on the KF25 flange, if it is not too long. It is good to keep the hose length for pump down as short as possible.
Created on Monday, April 09, 2001 2:51 PM EDT by Richard L. Hester